- Title
- Note: An improved low-frequency correction technique for piezoelectric force sensors in high-speed nanopositioning systems
- Creator
- Yong, Yuen K.; Fleming, Andrew J.
- Relation
- ARC
- Relation
- Review of Scientific Instruments Vol. 88, Issue 4, no. 046105
- Publisher Link
- http://dx.doi.org/10.1063/1.4981530
- Publisher
- AIP Publishing
- Resource Type
- journal article
- Date
- 2017
- Description
- Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the high-pass response of the piezo and interface electronics. This article describes a simplified method for low-frequency correction that uses the piezoelectric sensor as an electrical component in a filter circuit. The resulting response is first-order, rather than second-order, with a cut-off frequency equal to that of a buffer circuit with the same input resistance. The proposed method is demonstrated to allow simultaneous damping and tracking control of a high-speed vertical nanopositioning stage.
- Subject
- piezoelectricity; piezoelectric devices; tracking devices; frequency measurement; electrical sensors
- Identifier
- http://hdl.handle.net/1959.13/1350246
- Identifier
- uon:30516
- Identifier
- ISSN:0034-6748
- Rights
- This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Review of Scientific Instruments and may be found at http://dx.doi.org/10.1063/1.4981530.
- Language
- eng
- Full Text
- Reviewed
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