- Title
- Design and analysis of piezoelectric cantilevers with enhanced higher eigenmodes for atomic force microscopy
- Creator
- Moore, Steven I.; Ruppert, Michael G.; Yong, Yuen Kuan
- Relation
- 2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM). Proceedings of the 2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM) (Munich, Germany 3-7 July, 2017) p. 719-724
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2017.8014102
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2017
- Description
- Atomic force microscope (AFM) cantilevers with integrated actuation and sensing provide several distinct advantages over conventional cantilever instrumentation such as clean frequency responses, the possibility of down-scaling and parallelization to cantilever arrays as well as the absence of optical interferences. However, for multifrequency AFM techniques involving higher eigenmodes of the cantilever, optimization of the transducer location and layout has to be taken into account. This work proposes multiple integrated piezoelectric regions on the cantilever which maximize the deflection of the cantilever and the piezoelectric charge response for a given higher eigenmode based on the spatial strain distribution. Finite element analysis is performed to find the optimal transducer topology and experimental results are presented which highlight an actuation gain improvement up to 42 dB on the third mode and sensor sensitivity improvement up to 38 dB on the second mode.
- Subject
- design/control of MEMS-nano devices; Micro-Electro-Mechanical Systems; applications of nano technology
- Identifier
- http://hdl.handle.net/1959.13/1350131
- Identifier
- uon:30496
- Identifier
- ISBN:9781509059980
- Rights
- © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
- Language
- eng
- Full Text
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