- Title
- A switched actuation and sensing method for a MEMS electrostatic drive
- Creator
- Moore, Steven Ian; Moheimani, S. O. Reza
- Relation
- 2016 American Control Conference. Proceedings of the 2016 American Control Conference (ACC) (Boston, MA 6-8 July, 2016) p. 5817-5822
- Publisher Link
- http://dx.doi.org/10.1109/ACC.2016.7526581
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2016
- Description
- MEMS technology is being investigated to improve the performance, integration and cost of nanopositioning systems. The most basic MEMS fabrication processes produce designs etched into a single layer of silicon and electrostatic transduction is often seen as the most viable actuation and sensing technology. This work provides a method to utilize the same electrostatic drive for both actuation and sensing functions. By combining both functions into the one drive, an effective increase in actuator force and sensor sensitivity can be achieved. The sensor utilizes a sigma-delta type arrangement to create a displacement-to-digital converter. With the actuator composed of a switching amplifier, this allows the nanopositioner to be controlled directly from a DSP platform. This work outlines the design of the nanopositioning system, provides the system modeling and identification and characterizes the open loop performance of the nanopositioner.
- Subject
- open loop performance; sensing method; displacement-to-digital converter; switching amplifier; DSP platform; nanopositioning system design; switched actuation; MEMS electrostatic drive; nanopositioning systems; MEMS fabrication processes; electrostatic transduction; silicon transduction; actuator force; sensor sensitivity
- Identifier
- http://hdl.handle.net/1959.13/1346919
- Identifier
- uon:29957
- Identifier
- ISBN:9781467386821
- Rights
- © 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
- Language
- eng
- Full Text
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