- Title
- Cross coupling in parallel kinematic MEMS nanopositioners
- Creator
- Maroufi, Mohammad; Moheimani, S. O. Reza
- Relation
- 8th ASME Annual Dynamic Systems and Control Conference (DSCC 2015). ASME Proceedings: Vibration and Control of Smart Structures/Mech Systems, Volume 3 (Columbus, OH 28-30 October, 2015)
- Relation
- http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleID=2482093
- Publisher
- The American Society of Mechanical Engineers
- Resource Type
- conference paper
- Date
- 2016
- Description
- In this paper we study the origins of the cross coupling phenomenon in MEMS nanopositioners with a parallel kinematic mechanism. An analytical model is provided for a generic 2-DOF MEMS nanopositioner. The model accounts for the potential mechanical asymmetries present in the device due to micro-fabrication imperfections. Simulations are performed based on the obtained model and compared with experimental data from a previously reported MEMS nanopositioner. A close agreement is observed between the analytical and experimental results, leading to a better understanding of the phenomenon.
- Subject
- kinematics; microelectromechanical systems; MEMS nanopositioners; cross coupling
- Identifier
- http://hdl.handle.net/1959.13/1345329
- Identifier
- uon:29614
- Identifier
- ISBN:9780791857267
- Language
- eng
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