- Title
- Design, modeling, and characterization of an XY nanopositioning stage constructed from a single sheet of piezoelectric material
- Creator
- Fleming, Andrew J.; Berriman, Garth; Yong, Yuen Kuan
- Relation
- 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM). Proceedings of the 2016 IEEE International Conference on Advanced Intelligent Mechatronics ( 12-15 July, 2016) p. 1333-1338
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2016.7576955
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2016
- Description
- This article describes the design, fabrication and testing of a new XY nanopositioning stage constructed from a single sheet of piezoelectric material. The approach involves direct ultrasonic machining of a piezoelectric sheet to create flexural and actuator features. An industrial inkjet printer is then used to create electrode features by printing Nitric Acid directly onto the evaporated metal surface of the piezo sheet. The result is a monolithic piezoelectric structure with individual electrical control over each actuator feature. Experimental results demonstrate a full-scale range of 9 μm in the X and Y axes, and a first resonance frequency of 230 Hz in the Z axes. The completed nanopositioner is the thinnest yet reported with a thickness of only 500 μm. The new design method will enable a new range of ultra-compact applications in scanning probe microscopy, scanning electron microscopy, and active optics.
- Subject
- nanopositioning; electrodes; actuators; resonant frequency; finite element analysis; force; machining
- Identifier
- http://hdl.handle.net/1959.13/1340739
- Identifier
- uon:28561
- Identifier
- ISBN:9781509020652
- Language
- eng
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