- Title
- Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
- Creator
- Fowler, Anthony G.; Maroufi, Mohammad; Moheimani, S. O. Reza
- Relation
- Review of Scientific Instruments Vol. 86, Issue 4, no. 046107
- Publisher Link
- http://dx.doi.org/10.1063/1.4918729
- Publisher
- AIP Publishing
- Resource Type
- journal article
- Date
- 2015
- Description
- A new microelectromechanical systems-based 2-degree-of-freedom (DoF) scanner with an integrated cantilever for on-chip atomic force microscopy (AFM) is presented. The silicon cantilever features a layer of piezoelectric material to facilitate its use for tapping mode AFM and enable simultaneous deflection sensing. Electrostatic actuators and electrothermal sensors are used to accurately position the cantilever within the x-y plane. Experimental testing shows that the cantilever is able to be scanned over a 10 µm x 10 µm window and that the cantilever achieves a peak-to-peak deflection greater than 400 nm when excited at its resonance frequency of approximately 62 kHz.
- Subject
- microelectromechanical systems; atomic force microscopy
- Identifier
- http://hdl.handle.net/1959.13/1339087
- Identifier
- uon:28174
- Identifier
- ISSN:1089-7623
- Rights
- This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in AG Fowler, M Maroufi & AOR Moheimani, Review of Scientific Instruments. 86, 046107 (2015) http://dx.doi.org/10.1063/1.4918729
- Language
- eng
- Full Text
- Reviewed
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