- Title
- Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner
- Creator
- Bazaei, Ali; Fowler, Anthony G.; Maroufi, Mohammad; Moheimani, S. O. Reza
- Relation
- 2015 IEEE Conference on Control Applications (CCA). Proceedings of the 2015 IEEE Conference on Control Applications (CCA) (Sydney 21-23 September, 2015) p. 1014-1019
- Publisher Link
- http://dx.doi.org/10.1109/CCA.2015.7320745
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2015
- Description
- This paper presents a novel application of internal model control (IMC) for high-precision tracking of spiral reference signals generated by single-tone sine waves. In contrast to the existing spiral tracking control methods, the IMC approach provides zero steady-state tracking error for linear-time-invariant plants. An application of the proposed method is demonstrated with a two-axis microelectromechanical system (MEMS) stage that has a dominant resonance frequency of 1.3 kHz. Using a reference sinusoidal frequency of 1.4 kHz, the stage can scan a 16 μm-diameter area within 55ms with a root-mean-squared (rms) tracking error of 20nm.
- Subject
- microelectromechanical systems; internal model control; IMC; high precision tracking
- Identifier
- http://hdl.handle.net/1959.13/1330050
- Identifier
- uon:26296
- Identifier
- ISBN:9781479977871
- Language
- eng
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