- Title
- A Z-scanner design for high-speed scanning probe microscopy
- Creator
- Yong, Yuen Kuan; Moheimani, S. O. Reza
- Relation
- 2012 IEEE International Conference on Robotics and Automation (ICRA). Proceedings of the 2012 IEEE International Conference on Robotics and Automation (Saint Paul, MN 14-18 May, 2012) p. 4780-4785
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/ICRA.2012.6224758
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2012
- Description
- A major challenge in high-speed Atomic Force Microscopy is the low vertical bandwidth of the Z-scanner feedback loop. The maximum vertical feedback bandwidth is limited by the first Z-axis resonance frequency of the scanner. In this article, the design of a fast Z-scanner for high-speed Atomic Force Microscopy is presented. The Z-scanner consists of a piezoelectric stack actuator and a diaphragm flexure. The flexure provides the necessary preload to the actuator to prevent it from getting damaged during high-speed scans. A finite-element-analysis based optimization method is used to achieve a high resonance frequency of about 60 kHz. A counterbalance is added to the Z-scanner to minimize the inertial effect which tends to cause vibrations in the lateral axes of the device. This mechanical design enabled us to achieve a closed-loop vertical control bandwidth of 6.5 kHz. This is significantly higher than the closed loop bandwidth of the commercial AFM in which this stage was tested. AFM images of a test grating with sharp corners were recorded at a resolution of 200 x 200 pixels at 10 Hz, 100 Hz and 200 Hz line rates without noticeable image artifacts due to insufficient vertical bandwidth and vibrations.
- Subject
- bandwith; actuators; force; resonant frequency; finite element methods; gratings; microscopy
- Identifier
- http://hdl.handle.net/1959.13/1319597
- Identifier
- uon:23910
- Identifier
- ISBN:9781467314053
- Language
- eng
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