A robust loop-shaping approach to fast and accurate nanopositioning

Title: A robust loop-shaping approach to fast and accurate nanopositioning
Creator: Aphale, Sumeet S.; Ferreira, Antoine; Moheimani, S. O. Reza
Relation: Sensors and Actuators A: Physical Vol. 204, p. 88-96
Publisher Link: http://dx.doi.org/10.1016/j.sna.2013.10.006
Publisher: Elsevier
Resource Type: journal article
Date: 2013
Description: Inherent nonlinearities as well as their sharp lightly-damped resonant mode severely limit the positioning bandwidth of commercially available piezoelectric stack actuated nanopositioners. In this paper, we propose a hybrid control scheme that incorporates a H_∞-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.
Subject: nanopositioning; <i>H</i><sub>∞</sub> loop-shaping; resonance damping; tracking; rastering
Identifier: http://hdl.handle.net/1959.13/1317670
Identifier: uon:23469
Identifier: ISSN:0924-4247
Language: eng
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