Tracking of triangular references using signal transformation for control of a novel AFM scanner stage

Title: Tracking of triangular references using signal transformation for control of a novel AFM scanner stage
Creator: Bazaei, Ali; Yong, Yuen Kuan; Moheimani, S. O. Reza; Sebastian, Abu
Relation: ARC
Relation: IEEE Transactions on Control Systems Technology Vol. 20, Issue 2, p. 453-464
Publisher Link: http://dx.doi.org/10.1109/TCST.2011.2114347
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2012
Description: In this paper, we design feedback controllers for lateral and transversal axes of an atomic force microscope (AFM) piezoelectric tube scanner. The controllers are constrained to keep the standard deviation of the measurement noise fed back to the displacement output around 0.13 nm. It is shown that the incorporation of appropriate inner loops provides disturbance rejection capabilities and robustness against dc gain uncertainties, two requirements for satisfactory operation of signal transformation method. Simulations and experiments show significant improvement of steady-state tracking error with signal transformation, while limiting the projected measurement noise.
Subject: closed-loop bandwith; measurement noise; robustification; scanning probe microscopy; sensor fusion; signal transformation; switched control; triangular reference
Identifier: http://hdl.handle.net/1959.13/1311879
Identifier: uon:22310
Identifier: ISSN:1063-6536
Language: eng
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