- Title
- A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices
- Creator
- Fowler, A. G.; Moheimani, S. O. R.; Behrens, S.
- Relation
- 13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2013). 3th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications: Conference Proceedings (London 3-6 December, 2013)
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1088/1742-6596/476/1/012002
- Publisher
- Institute of Physics
- Resource Type
- conference paper
- Date
- 2013
- Description
- This paper reports the design and testing of a microelectromechanical systems (MEMS) energy harvester that is designed to harvest electrical energy from an external source of ultrasonic waves. This mechanism is potentially suited to applications including the powering of implanted devices for biomedical applications. The harvester employs a novel 3-degree of freedom design, with electrical energy being generated from displacements of a proof mass via electrostatic transducers. A silicon-on-insulator MEMS process was used to fabricate the device, with experimental characterization showing that the harvester can generate 24.7 nW, 19.8 nW, and 14.5 nW of electrical power respectively through its x-, y-, and z-axis vibrational modes.
- Subject
- microelectromechanical systems (MEMS); ultrasonic waves; energy harvester
- Identifier
- http://hdl.handle.net/1959.13/1308788
- Identifier
- uon:21717
- Identifier
- ISSN:1742-6596
- Language
- eng
- Full Text
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