Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters

Title: Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
Creator: Bazaei, Ali; Fowler, Anthony G.; Moheimani, S. O. Reza
Relation: IEEE Sensors 2012. Proceedings of the IEEE Sensors 2012 (Taipei, Taiwan 28-31 October, 2012) p. 1-4
Relation: ARC
Publisher Link: http://dx.doi.org/10.1109/ICSENS.2012.6411220
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2012
Description: For electrothermal MEMS position sensors, we introduce a non-uniform beam profile to enhance their sensitivity, linearity, and noise characteristics. Simulation results confirm that the proposed beam profile provides a more uniform temperature distribution compared to conventional electrothermal sensors with uniform beam cross sections. The effectiveness of the proposed sensor compared to a conventional design is experimentally verified by fabricating and testing an electrostatic SOI MEMS nanopositioner equipped with both types of sensors.
Subject: electrostatic devices; heating; microsensors; position measurement; silicon-on-insulator
Identifier: http://hdl.handle.net/1959.13/1305491
Identifier: uon:21059
Identifier: ISBN:9781457717666
Language: eng
Reviewed

		Thumbnail	File	Description	Size	Format