- Title
- Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters
- Creator
- Bazaei, Ali; Fowler, Anthony G.; Moheimani, S. O. Reza
- Relation
- IEEE Sensors 2012. Proceedings of the IEEE Sensors 2012 (Taipei, Taiwan 28-31 October, 2012) p. 1-4
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2012.6411220
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2012
- Description
- For electrothermal MEMS position sensors, we introduce a non-uniform beam profile to enhance their sensitivity, linearity, and noise characteristics. Simulation results confirm that the proposed beam profile provides a more uniform temperature distribution compared to conventional electrothermal sensors with uniform beam cross sections. The effectiveness of the proposed sensor compared to a conventional design is experimentally verified by fabricating and testing an electrostatic SOI MEMS nanopositioner equipped with both types of sensors.
- Subject
- electrostatic devices; heating; microsensors; position measurement; silicon-on-insulator
- Identifier
- http://hdl.handle.net/1959.13/1305491
- Identifier
- uon:21059
- Identifier
- ISBN:9781457717666
- Language
- eng
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