- Title
- MEMS nanopositioner for Lissajous-scan atomic force microscopy
- Creator
- Fowler, Anthony G.; Maroufi, Mohammad; Bazaei, Ali; Moheimani, S. O. Reza
- Relation
- ASME 2014 Dynamic Systems and Control Conference. Proceedings of the ASME 2014 Dynamic Systems and Control Conference (San Antonio, Texas 22-24 October, 2014)
- Publisher Link
- http://dx.doi.org/10.1115/DSCC2014-6044
- Publisher
- American Society of Mechanical Engineers (ASME)
- Resource Type
- conference paper
- Date
- 2014
- Description
- This paper presents a new silicon-on-insulator-based MEMS nanopositioner that is designed for high-speed on-chip atomic force microscopy (AFM). The device features four electrostatic actuators in a 2-DOF configuration that allows bidirectional actuation of a central stage along two orthogonal axes with displacements greater than ±10μm. The x- and y-axis resonant modes of the stage are located at 1274Hz and 1286Hz, respectively. Integrated electrothermal sensors are used to control the system in closed loop, with a damping controller and an internal model controller being implemented for each axis. The performance of the closed-loop system is demonstrated by performing a 20μm×20μm contact-mode AFM scan via a Lissajous scan trajectory with a 410Hz sinusoidal reference.
- Subject
- atomic force microscopy; microelectromechanical systems
- Identifier
- http://hdl.handle.net/1959.13/1304840
- Identifier
- uon:20939
- Identifier
- ISBN:9780791846209
- Language
- eng
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