- Title
- Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM
- Creator
- Wadikhaye, Sachin P.; Yong, Yuen Kuan; Moheimani, S. O. Reza
- Relation
- 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM). Proceedings of the 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Besancon, France 8-11 July, 2014) p. 210-215
- Relation
- ARC
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2014.6878080
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2014
- Description
- A flexure-guided serial-kinematic XYZ nanopositioner for high-speed Atomic Force Microscopy (AFM) is presented in this paper. Two aspects influencing the performance of serial-kinematic nanopositioners are studied in this work. First, mass reduction by use of tapered flexures is used to enhance the natural frequency of the nanopositioner. Second, a study of possible sensor positioning in a serial-kinematic nanopositioner is presented. An arrangement of sensors for exact estimation of cross-coupling is incorporated in the proposed design. Characterization in terms of range, hysteresis, cross-coupling and dynamic response of the nanopositioner is presented. Scanning results up to 640 Hz are also furnished. Outcomes and future work are discussed in conclusion.
- Subject
- atomic force microscopy; nanopositioning; sensors
- Identifier
- http://hdl.handle.net/1959.13/1302126
- Identifier
- uon:20411
- Identifier
- ISBN:9781479957361
- Language
- eng
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