A review of nanometer resolution position sensors: operation and performance

Title: A review of nanometer resolution position sensors: operation and performance
Creator: Fleming, Andrew J.
Relation: ARC.DP0986319
Relation: Sensors and Actuators A: Physical Vol. 190, p. 106-126
Publisher Link: http://dx.doi.org/10.1016/j.sna.2012.10.016
Publisher: Elsevier BV
Resource Type: journal article
Date: 2013
Description: Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.
Subject: position sensors; nanopositioning; resolution; linearity; noise; metrology
Identifier: http://hdl.handle.net/1959.13/1299479
Identifier: uon:19886
Identifier: ISSN:0924-4247
Language: eng
Reviewed

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