- Title
- MEMS rotary microgripper with integrated electrothermal force sensor
- Creator
- Piriyanont, Busara; Moheimani, S. O. Reza
- Relation
- Journal of Microelectromechanical Systems Vol. 23, Issue 6, p. 1249-1251
- Publisher Link
- http://dx.doi.org/10.1109/JMEMS.2014.2353034
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2014
- Description
- A microelectromechanical systems (MEMS) rotary microgripper incorporating electrothermal force sensors is reported. The device is fabricated using a standard SOI-MEMS process and achieves a stroke of (90 µm) at a relatively low voltage (<80 V). The electrothermal force sensor has a small footprint, is quite linear, and operates with a high accuracy. Being fabricated from biocompatible material (silicon) with sufficiently long gripping arms, the gripper can be used to manipulate living cells, tissues, and other biologically relevant samples. A pick-and-place experiment on a soft cell is conducted to verify performance of the proposed rotary microgripper.
- Subject
- MEMS; micro-gripper; electrothermal sensor; micromanipulation; single cell
- Identifier
- http://hdl.handle.net/1959.13/1299350
- Identifier
- uon:19853
- Identifier
- ISSN:1057-7157
- Language
- eng
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