- Title
- Simultaneous actuation and sensing for electrostatic drives in MEMS using frequency modulated capacitive sensing
- Creator
- Moore, Steven I.; Moheimani, S. O. Reza
- Relation
- 19th World Congress of the International Federation of Automatic Control (IFAC 2014). Proceedings of the 19th IFAC World Congress, 2014 (Cape Town, South Africa 24-29 August, 2014) p. 6545-6549
- Publisher Link
- http://dx.doi.org/10.3182/20140824-6-ZA-1003.00080
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2014
- Description
- This paper presents a displacement sensing technique that can be integrated into a microfabricated microelectromechanical system (MEMS) device. This sensor determines displacement by measuring the capacitance of a MEMS electrostatic drive, as the capacitance is a function of the displacement. The electrostatic drive is incorporated into an LC oscillator whose frequency varies with the capacitance. A lock-in amplifier is used to extract the frequency signal. The sensitivity of the sensor was -1.153 V µm-1 and exhibited no dynamics up to the 1.2 kHz bandwidth of the MEMS device it was implemented in. The electrostatic drive in this technique is used for both actuation and sensing. This effectively increases the transduction efficiency of both the actuator and sensor as more space on the die can be dedicated to the one drive. Additionally, the scheme allows for one terminal of the drive to be grounded. Thus, this scheme can be used on MEMS devices with more than one drive connected to a common mechanical structure which is electrically grounded.
- Subject
- micro and nano mechatronic systems; motion control systems; reliable measurement and actuation
- Identifier
- http://hdl.handle.net/1959.13/1297065
- Identifier
- uon:19367
- Identifier
- ISBN:9783902823625
- Language
- eng
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