- Title
- Novel reciprocal self-sensing techniques for tapping-mode atomic force microscopy
- Creator
- Ruppert, Michael G.; Moheimani, S. O. Reza
- Relation
- 19th World Congress of the International Federation of Automatic Control (IFAC 2014). Proceedings of the 19th IFAC World Congress, 2014 (Cape Town, South Africa 24-29 August, 2014) p. 7474-7479
- Publisher Link
- http://dx.doi.org/10.3182/20140824-6-ZA-1003.00376
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2014
- Description
- We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively. A microcantilever, which can be batch fabricated through a standard microelectromechanical system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for actuation and deflection sensing. The setup enables the elimination of the optical beam deflection technique which is commonly used to measure the cantilever oscillation amplitude. The voltage to charge and charge to voltage transfer functions reveal a high amount of capacitive feedthrough which degrades the dynamic range of the sensors significantly. A feedforward control technique is employed to cancel the feedthrough and increase the dynamic range from less than 1dB to approximately 30 dB. Experiments show that the conditioned self-sensing schemes achieve an excellent signal-to-noise ratio and can therefore be used to provide the feedback signal for TM-AFM imaging.
- Subject
- microsystems; nano- and micro-technologies; micro and nano mechatronic systems; smart senors and actuators
- Identifier
- http://hdl.handle.net/1959.13/1297053
- Identifier
- uon:19363
- Identifier
- ISBN:9783902823625
- Rights
- © 2014 IFAC. Personal use of this material is permitted. Permission from IFAC must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
- Language
- eng
- Full Text
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