- Title
- Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor
- Creator
- Piriyanont, Busara; Moheimani, S. O. Reza
- Relation
- 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing (AIM 2013). Proceedings of the 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013 (Wollongong, Australia 09-12 July, 2013) p. 348-353
- Publisher Link
- http://dx.doi.org/10.1109/AIM.2013.6584116
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2013
- Description
- With growing developments in biomedical research and micro industrial applications, there is a demand for micro-grippers that are reliable and can operate with high precision. This paper presents a MEMS micro-gripper with an integrated electrothermal force sensors. The microgripper is actuated by electrostatic comb-drives. Electrothermal resistive sensors are used to measure the gripping force. In this arrangement, the sensing arms deflection induces a temperature difference between two identical resistive sensors, biased at the same voltage, which results in current variation in the resistors. The currents are then converted to an output voltage using a half Wheat-stone bridge and an instrumentation amplifier. With the sensing displacement information available, the gripping force can be calculated. The device was designed and fabricated in a commercial Silicon-On Insulator MEMS foundry (MEMSCAP). A pick-and-place operation on 85 μm micro-beads on 3-axis micro-positioner is performed to evaluate the performance of the device. The experiment shows that the micro-gripper is able to handle a wide range of micro-sample sizes with biocompatibility and gentle handling forces.
- Subject
- bridge circuits; control system synthesis; dexterous manipulators; displacement measurement; electrostatic actuators; force measurement; force sensors
- Identifier
- http://hdl.handle.net/1959.13/1295480
- Identifier
- uon:19038
- Identifier
- ISBN:9781467353205
- Language
- eng
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