- Title
- Design of an inertially counterbalanced z-nanopositioner for high-speed atomic force microscopy
- Creator
- Yong, Y. K.; Mohemani, S. O. R.
- Relation
- ARC
- Relation
- IEEE Transactions on Nanotechnology Vol. 12, Issue 2, p. 137-145
- Publisher Link
- http://dx.doi.org/10.1109/TNANO.2012.2233749
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2013
- Description
- In many conventional atomic force microscopes (AFMs), one of the key hurdles to high-speed scanning in constant-force contact mode is the low-feedback control bandwidth of the -axis loop. This paper presents the design of a fast -nanoposi-tioner to overcome this limitation. The -nanopositioner has its first resonant mode at 60 kHz and a travel range of 5 m. It consists of a piezoelectric stack actuator and a diaphragm flexure. The flexure serves as a linear spring to preload the actuator and to prevent it from getting damaged during high-speed operations. The -nanopositioner is mounted to an XY-nanopositioner. To avoid exciting the resonance of the XY -nanopositioner, an inertial counterbalance configuration was incorporated in the design of the -nanopositioner. With this configuration, the resonances of the XY-nanopositioner were not triggered. A closed-loop vertical control bandwidth of 6.5 kHz is achieved. High-speed constant-force contact-mode images were recorded at a resolution of 200 200 pixels at 10, 100, and 200 Hz line rates without noticeable image artifacts due to insufficient control bandwidth and vibrations. Images were also recorded at 312- and 400-Hz line rates. These images do not show significant artifacts. These line rates are much higher than the closed-loop bandwidth of a conventional AFM in which this nanopositioner was tested.
- Subject
- atomic force microscope; flexure; nanopositioner; vertical bandwith
- Identifier
- http://hdl.handle.net/1959.13/1295407
- Identifier
- uon:19016
- Identifier
- ISSN:1536-125X
- Language
- eng
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