Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner

Title: Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner
Creator: Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R.
Relation: IEEE Electron Device Letters Vol. 32, Issue 8, p. 1146-1148
Publisher Link: http://dx.doi.org/10.1109/led.2011.2155027
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2011
Description: This letter reports a micromachined nanopositioner with capacitive actuation together with capacitive and electrothermal sensing on a single chip. With the actuation voltage of 60 V, the electrostatic actuator can achieve a maximum displacement of 2.32 μm. The displacement can be simultaneously measured using capacitive and electrothermal sensors. Both sensors are calibrated to operate at a sensitivity of 0.0137 V/V. The electrothermal sensor is found to display 1/f noise, which affects the low-frequency measurements obtained from this device. However, at higher frequencies, it displays a lower noise power spectral density when compared with the capacitive sensor. The comparisons of frequency responses, power consumptions, and noise performances are presented in this letter.
Subject: capacitive position sensing; electrothermal position sensing; micromachined nanopositioner; sensor fusion
Identifier: http://hdl.handle.net/1959.13/1065859
Identifier: uon:17967
Identifier: ISSN:0741-3106
Language: eng
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