- Title
- Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues
- Creator
- Yong, Y. K.; Moheimani, S. O. R.; Kenton, B. J.; Leang, K. K.
- Relation
- Review of Scientific Instruments Vol. 83, Issue 12
- Publisher Link
- http://dx.doi.org/10.1063/1.4765048
- Publisher
- American Institute of Physics
- Resource Type
- journal article
- Date
- 2012
- Description
- Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.
- Subject
- atomic force microscopes; nanopositioning systems; nanotechnology; scanning
- Identifier
- http://hdl.handle.net/1959.13/1050894
- Identifier
- uon:15215
- Identifier
- ISSN:0034-6748
- Rights
- © American Institute of Physics
- Language
- eng
- Full Text
- Reviewed
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| Thumbnail | File | Description | Size | Format | |||
|---|---|---|---|---|---|---|---|
| View Details Download | ATTACHMENT01 | Publisher version (open access) | 2 MB | Adobe Acrobat PDF | View Details Download |