- Title
- Note: A method for estimating the resolution of nanopositioning systems
- Creator
- Fleming, Andrew J.
- Relation
- Review of Scientific Instruments Vol. 83, Issue 8
- Publisher Link
- http://dx.doi.org/10.1063/1.4739508
- Publisher
- American Institute of Physics
- Resource Type
- journal article
- Date
- 2012
- Description
- This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.
- Subject
- nanopositioning systems; resolution; position sensitive detectors; amplifiers
- Identifier
- http://hdl.handle.net/1959.13/1049910
- Identifier
- uon:15092
- Identifier
- ISSN:0034-6748
- Rights
- © American Institute of Physics
- Language
- eng
- Full Text
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|---|---|---|---|---|---|---|---|
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