- Title
- High speed nanopositioning with force feedback
- Creator
- Fleming, Andrew J.
- Relation
- 2010 American Control Conference (ACC 2010). Proceedings of the 2010 American Control Conference (Baltimore, MD 30 June - 2 July, 2010) p. 4969-4974
- Relation
- http://ieeexplore.ieee.org/xpl/articleDetails.jsp?reload=true&tp=&arnumber=5530939
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2010
- Description
- In this work a new method for feedback control of nanopositioning systems is proposed. A measurement of the force applied to the moving platform by the actuator is utilized as a feedback variable for both tracking and damping control. Excellent tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with force feedback control). Gain-margin is simultaneously improved from 5 dB to infinity.
- Subject
- closed-loop bandwidth; damping control; damping performance; feedback control; integral controller; nanopositioning systems; resonance frequency
- Identifier
- http://hdl.handle.net/1959.13/933889
- Identifier
- uon:11748
- Identifier
- ISBN:9781424474264
- Identifier
- ISSN:0743-1619
- Language
- eng
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