High performance nanopositioning with integrated strain and force feedback

Title: High performance nanopositioning with integrated strain and force feedback
Creator: Fleming, Andrew J.; Leang, Kam K.
Relation: 5th IFAC Symposium on Mechatronic Systems. Proceedings of the 5th IFAC Symposium on Mechatronic Systems (Cambridge, MA September 13-15, 2010) p. 117-124
Publisher Link: http://dx.doi.org/10.3182/20100913-3-US-2015.00128
Publisher: International Federation of Automatic Control (IFAC)
Resource Type: conference paper
Date: 2010
Description: This paper presents a new sensor arrangement and feedback controller for hysteresis, creep and vibration in piezoelectric actuators. A force and strain sensor is combined to provide both extremely low noise and high stability. The proposed technique is demonstrated on a nanopositioning platform with a range of 10 µm and a resonance frequency of 2.4 kHz. In closed-loop, the controller damps the resonance by 33 dB and provides a tracking bandwidth of 1.8 kHz. Excellent tracking of a 130 Hz triangular reference and reduction of hysteresis to 0.46% at 10 Hz is also demonstrated. Closed-loop positioning noise was approximately 0.67 nm peak-to-peak, or 0.0067% of the 10 µm range.
Subject: nanopositioning; motion control; hysteresis; creep; force feedback; sensor fusion; piezoelectric actuators; position sensing
Identifier: http://hdl.handle.net/1959.13/933512
Identifier: uon:11644
Identifier: ISBN:9783902661760
Identifier: ISSN:1474-6670
Language: eng
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