- Title
- High performance nanopositioning with integrated strain and force feedback
- Creator
- Fleming, Andrew J.; Leang, Kam K.
- Relation
- 5th IFAC Symposium on Mechatronic Systems. Proceedings of the 5th IFAC Symposium on Mechatronic Systems (Cambridge, MA September 13-15, 2010) p. 117-124
- Publisher Link
- http://dx.doi.org/10.3182/20100913-3-US-2015.00128
- Publisher
- International Federation of Automatic Control (IFAC)
- Resource Type
- conference paper
- Date
- 2010
- Description
- This paper presents a new sensor arrangement and feedback controller for hysteresis, creep and vibration in piezoelectric actuators. A force and strain sensor is combined to provide both extremely low noise and high stability. The proposed technique is demonstrated on a nanopositioning platform with a range of 10 µm and a resonance frequency of 2.4 kHz. In closed-loop, the controller damps the resonance by 33 dB and provides a tracking bandwidth of 1.8 kHz. Excellent tracking of a 130 Hz triangular reference and reduction of hysteresis to 0.46% at 10 Hz is also demonstrated. Closed-loop positioning noise was approximately 0.67 nm peak-to-peak, or 0.0067% of the 10 µm range.
- Subject
- nanopositioning; motion control; hysteresis; creep; force feedback; sensor fusion; piezoelectric actuators; position sensing
- Identifier
- http://hdl.handle.net/1959.13/933512
- Identifier
- uon:11644
- Identifier
- ISBN:9783902661760
- Identifier
- ISSN:1474-6670
- Language
- eng
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