Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation
- Creator: Fowler, Anthony G. , Rakotondrabe, Micky , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2013
Bidirectional electrothermal actuator with Z-shaped beams
- Creator: Zhu, Yong , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2012