Displacement amplification and piezo-sensing in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali
- Resource Type: thesis
- Date: 2022
Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2022
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2021
Displacement sensing with silicon flexures in MEMS nanopositioners
- Creator: Bazaei, Ali , Maroufi, Mohammad , Mohammadi, Ali , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2014
High precision MEMS displacement sensors: device techniques and readout circuits
- Creator: Mohammadi, Ali
- Resource Type: thesis
- Date: 2014
Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing
- Creator: Fowler, Anthony G. , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2013