Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2011
A micromachined nanopositioner with on-chip electrothermal actuation and sensing
- Creator: Zhu, Y. , Bazaei, A. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010
Ultrasonic energy transmission and conversion using a 2-D MEMS resonator
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: journal article
- Date: 2010
A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications
- Creator: Zhu, Y. , Moheimani, S. O. R. , Yuce, M. R.
- Resource Type: conference paper
- Date: 2009
A low-loss MEMS tunable capacitor with movable dielectric
- Creator: Zhu, Y. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2009