Five-axis bimorph monolithic nanopositioning stage: Design, modeling, and characterization
- Creator: Omidbeike, Meysam , Moore, Steven I. , Yong, Yuen K. , Fleming, Andrew J.
- Resource Type: journal article
- Date: 2021
Serial-kinematic monolithic nanopositioner with in-plane bender actuators
- Creator: Moore, Steven I. , Yong, Yuen K. , Omidbeike, Meysam , Fleming, Andrew J.
- Resource Type: journal article
- Date: 2021
Electrode configurations for piezoelectric tube actuators with improved scan range and reduced cross-coupling
- Creator: Raghuvanshi, Digvijay S. , Moore, Steven I. , Fleming, Andrew John , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2020
A five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet
- Creator: Omidbeike, Meysam , Yong, Yuen K. , Moore, Steven I. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2019
Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning
- Creator: Moore, Steven I. , Fleming, Andrew J. , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2019
Multimodal atomic force microscopy with optimized higher eigenmode sensitivity using on-chip piezoelectric actuation and sensing
- Creator: Ruppert, Michael G. , Moore, Steven I. , Zawierta, Michal , Fleming, Andrew J. , Putrino, Gino , Yong, Yuen K.
- Resource Type: journal article
- Date: 2019
Direct design of closed-loop demodulators for amplitude modulation atomic force microscopy
- Creator: Ruppert, Michael G. , Harcombe, David M. , Moore, Steven I. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2018
Design and analysis of piezoelectric cantilevers with enhanced higher eigenmodes for atomic force microscopy
- Creator: Moore, Steven I. , Ruppert, Michael G. , Yong, Yuen Kuan
- Resource Type: conference paper
- Date: 2017
Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement
- Creator: Moore, Steven I. , Ruppert, Michael G. , Yong, Yuen Kuan
- Resource Type: journal article
- Date: 2017
Displacement measurement with a self-sensing MEMS electrostatic drive
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014
Simultaneous actuation and sensing for electrostatic drives in MEMS using frequency modulated capacitive sensing
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014